Copper Interconnect Technology by Tapan Gupta

By Tapan Gupta

Since total circuit functionality has depended totally on transistor homes, past efforts to augment circuit and approach velocity have been fascinated about transistors in addition. over the last decade, even though, the parasitic resistance, capacitance, and inductance linked to interconnections started to effect circuit functionality and may be the first elements within the evolution of nanoscale ULSI expertise. simply because steel conductivity and resistance to electromigration of bulk copper (Cu) are greater than aluminum, use of copper and low-k fabrics now prevails within the foreign microelectronics undefined. although, because the function measurement of the Cu-lines forming interconnects is scaled, resistivity of the traces raises. even as electromigration and stress-induced voids as a result of elevated present density turn into major reliability concerns. even though copper/low-k expertise has develop into relatively mature, there's no unmarried e-book on hand at the promise and demanding situations of those next-generation applied sciences. during this booklet, a pace-setter within the box describes complicated laser platforms with decrease radiation wavelengths, photolithography fabrics, and mathematical modeling methods to deal with the demanding situations of Cu-interconnect expertise.

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39, Courtesy: Novellus Systems) order. The Y-axis represents numbers. The bar graph indicates how the grain size, line width and resitivity of a Cu-line are related to each other. 31 shows a comparison of two different plating chemistries on grain structure inside a 5:1 aspect ratio trench. For both chemistries, the grain size of Cu in the field is many times larger than the mean free path of the electrons, consistent with no grain boundary scattering in the copper after a post plating anneal. 3 Melting Temperature The melting temperature (melting point, mp) of a metal plays an important role in determining the grain size of a metal during deposition.

However, the deposition processes for these materials are still under investigation. For example, high temperature (>400◦ C) chemical vapor deposition (CVD) processes confront issues with wafer bowing [169–170]. But the challenges for physical vapor deposition (PVD) are somewhat different. It goes without saying that optimization of the PVD [171–172] source to obtain equivalent or better within-wafer uniformity is critical. It is true that compared to CVD or PVD, the low-temperature atomic layer deposition (ALD) process is better for very thin films (of the order of an ångstrom unit) but for thick films it is not a very cost-effective procedure [173–174].

41). Silicon is an elemental semiconductor. It has a diamond crystal structure, which is characterized by extremely high stability. A single crystal of Si is grown mostly by 34 1 Introduction Fig. 41 The realization of a 300 mm silicon waferfabrication process from a 200 mm wafer fabrication process (Reprinted with permission Semiconductor International, June 2003, p. 47, Courtesy, Lam Research) the Czocharlski method at high temperatures [149]. It is cut, polished, and cleaned. Generally two types of crystals are grown, <111> and <100 >.

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